Plasma Electronics, 3rd Edition
Applications in Microelectronic Device Fabrication
$333.29
- Hardcover
389 pages
- Release Date
14 May 2026
Summary
More than two decades have passed since the first edition of Plasma Electronics was published. Today, we are entering an era that demands increasingly sophisticated control and design of plasma sources and related surface technologies for micro- and nano-electronic device fabrication. Plasma technology, based on surface interactions, continues to expand into emerging fields including biotechnology, medical science, and environmental applications.
Plasma Electronics: Applications in Mi…
Book Details
| ISBN-13: | 9781041192237 |
|---|---|
| ISBN-10: | 1041192231 |
| Author: | Toshiaki Makabe, Zoran Lj. Petrović |
| Publisher: | Taylor & Francis Ltd |
| Imprint: | CRC Press |
| Format: | Hardcover |
| Number of Pages: | 389 |
| Edition: | 3rd |
| Release Date: | 14 May 2026 |
| Weight: | 0g |
| Dimensions: | 234mm x 156mm |
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About The Author
Toshiaki Makabe
Toshiaki Makabe received his BSc, MSc, and Ph.D. degrees in electrical engineering all from Keio University. He became a Professor of Electronics and Electrical Engineering in the Faculty of Science and Technology at Keio University in 1991.
Zoran Lj. Petrović obtained his Master’s degree in the Department of Applied Physics, Faculty of Electrical Engineering at the University of Belgrade, and earned his Ph.D. from the Australian National University.
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