Principles of Plasma Discharges and Materials Processing, 9781394245376
Hardcover
Plasma processing: Essential principles for microchips, solar panels, and beyond.

Principles of Plasma Discharges and Materials Processing

$314.80

  • Hardcover

    832 pages

  • Release Date

    16 August 2024

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Summary

Mastering Plasma: Principles of Discharges and Materials Processing

A new edition of this industry classic on the principles of plasma processing

Plasma-based technology and materials processes have been central to the revolution of the last half-century in micro- and nano-electronics. From anisotropic plasma etching on microprocessors, memory, and analog chips, to plasma deposition for creating solar panels and flat-panel displays, plasma-based materials pr…

Book Details

ISBN-13:9781394245376
ISBN-10:1394245378
Author:Michael A. Lieberman, Allan J. Lichtenberg
Publisher:John Wiley & Sons Inc
Imprint:John Wiley & Sons Inc
Format:Hardcover
Number of Pages:832
Edition:3rd
Release Date:16 August 2024
Weight:1.36kg
Dimensions:257mm x 183mm x 48mm
About The Author

Michael A. Lieberman

Michael A. Lieberman, PhD, is Professor of the Graduate School, Department of Electrical Engineering and Computer Sciences, University of California, Berkeley.

Allan J. Lichtenberg, PhD, was Emeritus Professor of the Department of Electrical Engineering and Computer Sciences, University of California, Berkeley.

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