
Principles of Plasma Discharges and Materials Processing
$314.80
- Hardcover
832 pages
- Release Date
16 August 2024
Summary
Mastering Plasma: Principles of Discharges and Materials Processing
A new edition of this industry classic on the principles of plasma processing
Plasma-based technology and materials processes have been central to the revolution of the last half-century in micro- and nano-electronics. From anisotropic plasma etching on microprocessors, memory, and analog chips, to plasma deposition for creating solar panels and flat-panel displays, plasma-based materials pr…
Book Details
ISBN-13: | 9781394245376 |
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ISBN-10: | 1394245378 |
Author: | Michael A. Lieberman, Allan J. Lichtenberg |
Publisher: | John Wiley & Sons Inc |
Imprint: | John Wiley & Sons Inc |
Format: | Hardcover |
Number of Pages: | 832 |
Edition: | 3rd |
Release Date: | 16 August 2024 |
Weight: | 1.36kg |
Dimensions: | 257mm x 183mm x 48mm |
About The Author
Michael A. Lieberman
Michael A. Lieberman, PhD, is Professor of the Graduate School, Department of Electrical Engineering and Computer Sciences, University of California, Berkeley.
Allan J. Lichtenberg, PhD, was Emeritus Professor of the Department of Electrical Engineering and Computer Sciences, University of California, Berkeley.
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