Plasma Etching, 9780198562870
Hardcover
Unlocking plasma etching: Theory, diagnostics, and practical applications revealed.

Plasma Etching

fundamentals and applications

$323.20

  • Hardcover

    356 pages

  • Release Date

    28 May 1998

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Summary

Plasma Etching: Unveiling the Art and Science of RF Glow Discharges

This book delves into the extraordinary progress made in comprehending low-pressure RF (radio frequency) glow discharges. It offers a clear explanation of the fundamental analytical theory and plasma physics. The text also explores plasma diagnostics, setting the stage for a practical examination of etcher applications.

Book Details

ISBN-13:9780198562870
ISBN-10:019856287X
Series:Series on Semiconductor Science and Technology
Author:M. Sugawara
Publisher:Oxford University Press
Imprint:Oxford University Press
Format:Hardcover
Number of Pages:356
Release Date:28 May 1998
Weight:743g
Dimensions:242mm x 163mm x 23mm
About The Author

M. Sugawara

Professor Minoru Sugawara is affiliated with the Hachinohe Institute of Technology, Hachinohe-city, Aomori 031, Japan. Fax: (0) 178 25 1430

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