
Hardcover
Unlocking plasma etching: Theory, diagnostics, and practical applications revealed.
Plasma Etching
fundamentals and applications
$323.20
- Hardcover
356 pages
- Release Date
28 May 1998
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Summary
Plasma Etching: Unveiling the Art and Science of RF Glow Discharges
This book delves into the extraordinary progress made in comprehending low-pressure RF (radio frequency) glow discharges. It offers a clear explanation of the fundamental analytical theory and plasma physics. The text also explores plasma diagnostics, setting the stage for a practical examination of etcher applications.
Book Details
ISBN-13: | 9780198562870 |
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ISBN-10: | 019856287X |
Series: | Series on Semiconductor Science and Technology |
Author: | M. Sugawara |
Publisher: | Oxford University Press |
Imprint: | Oxford University Press |
Format: | Hardcover |
Number of Pages: | 356 |
Release Date: | 28 May 1998 |
Weight: | 743g |
Dimensions: | 242mm x 163mm x 23mm |
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About The Author
M. Sugawara
Professor Minoru Sugawara is affiliated with the Hachinohe Institute of Technology, Hachinohe-city, Aomori 031, Japan. Fax: (0) 178 25 1430
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