Hardcover
This newest edition of Principles of Lithography reflects the continuing advancement of lithographic technology. In recent years, certain topics, such as line-edge roughness (LER), multi-electron-beam writers, have become more significant to practicing lithographers. As such extensive treatments of …
Principles of Lithography
$229.17
- Hardcover
630 pages
- Release Date
29 July 2019
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Summary
This newest edition of Principles of Lithography reflects the continuing advancement of lithographic technology. In recent years, certain topics, such as line-edge roughness (LER), multi-electron-beam writers, and nonlinear overlay models, have become much more significant to practicing lithographers, and more extensive treatments are therefore provided. EUV lithography is on the threshold for use in high-volume manufacturing, at nodes where a number of complex phenomena are relevant, and the…
Book Details
| ISBN-13: | 9781510627604 |
|---|---|
| ISBN-10: | 151062760X |
| Author: | Harry J. Levinson |
| Publisher: | SPIE Press |
| Imprint: | SPIE Press |
| Format: | Hardcover |
| Number of Pages: | 630 |
| Edition: | 4th |
| Release Date: | 29 July 2019 |
| Weight: | 1.42kg |
| Dimensions: | 262mm x 185mm |
| Series: | Press Monographs |
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